Projeto de microssensor de fluxo de massa para medicação de velocidade de fluidos / Mass flow microsensor design for fluid velocity measurement

Deivity C. Santos, Alípio M. Barbosa, Michel F. S. Moreira

Resumo


Neste trabalho são descritas as principais características e etapas de projeto e simulação de um microssensor de fluxo de massa do tipo calorimétrico, tendo como objetivo aferir vazão e velocidade de fluidos.  O dispositivo foi projetado computacionalmente e sua aplicabilidade avaliada a partir dos resultados de simulação.  Os dados obtidos permitiram concluir que a velocidades entre 0 e 14 m/s podem ser mensuradas por meio do aparato proposto.


Palavras-chave


Simulação de sistemas, instrumentação, microssensor, MEMS.

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Referências


Barmpakos, D., Famelis, I., Moschos, A., Marinatos, D., e Kaltsas, G. (2019). Design and evaluation of a multidi- rectional thermal flow sensor on flexible substrate. Journal of Sensors, 2019, 1–10. doi:10.1155/2019/8476489.

Djuzhev, N.A., Novikov, D.V., Demin, G.D., Ovodov, A.I., e Ryabov, V.T. (2018). An experimental study on mems-based gas flow sensor for wide range flow measurements. In 2018 IEEE Sensors Applications Symposium (SAS), 1–4. doi:10.1109/SAS.2018.8336727.

Elwenspoek, M. (1999). Thermal flow micro sensors. In International Semiconductor Conference. IEEE. doi: 10.1109/smicnd.1999.810580.

Gerdroodbary, M.B., Anazadehsayed, A., Hassanvand, A., e Moradi, R. (2018). Calibration of low-pressure mems gas sensor for detection of hydrogen gas. International Journal of Hydrogen Energy, 43(11), 5770–5782.

Haasl, S. e Stemme, G. (2008). Flow sensors. In Comprehensive Microsystems, 209–272. Elsevier. doi:10. 1016/b978-044452190-3.00054-9.

Inoue, R., Nogami, H., Higurashi, E., e Sawada, R. (2018). Simultaneous measurement of a blood flow and a contact pressure. In 11th International Conference on Bio- Inspired Systems and Signal Processing, BIOSIGNALS 2018-Part of 11th International Joint Conference on Biomedical Engineering Systems and Technologies, BI- OSTEC 2018, 48–53. SciTePress.

ller, J.M., Paul, O., e Burgard, W. (2012). Probabilistic velocity estimation for autonomous miniature airships using thermal air flow sensors. IEEE International Conference on Robotics & Automation, 39–44.

Lu, Y. (2017). Industry 4.0: A survey on technologies, applications and open research issues. Journal of Indus- trial Information Integration, 6, 1 – 10. doi:https://doi. org/10.1016/j.jii.2017.04.005.

Maluf, N. (2002). An introduction to microelectromecha- nical systems engineering. Measurement Science and Technology, 13, 229–229. doi:10.1088/0957-0233/13/2/

Melnyk, M., Rubacha, J., Kamisinski, T., e Majchrzak,

A. (2018). Application of mems sensors for the auto- mation of a laboratory stand for the measurement of the flow resistance of porous materials. In 2018 XIV- th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH), 28–34. doi:10.1109/MEMSTECH.2018.8365695.

Sazhin, O. (2013). Novel mass air flow meter for auto- mobile industry based on thermal flow microsensor i. analytical model and microsensor. Flow Measurement and Instrumentation, 30, 60–65.

Tokutake, H., Sunada, S., e Fujinaga, J. (2011). Attitude control of a small uav using a flow sensor system. Journal of System Design and Dynamics, 5, 16.

Vaidya, S., Ambad, P., e Bhosle, S. (2018). Industry 4.0

– a glimpse. Procedia Manufacturing, 20, 233 – 238. doi:https://doi.org/10.1016/j.promfg.2018.02.034. 2nd International Conference on Materials, Manufacturing and Design Engineering (iCMMD2017), 11-12 December 2017, MIT Aurangabad, Maharashtra, INDIA.

Wang, T., Wang, J., He, J., Wu, C., Luo, W., Shuai,

Y., Zhang, W., Chen, X., Zhang, J., e Lin, J. (2018). A comprehensive study of a micro-channel heat sink using integrated thin-film temperature sensors. Sensors, 18(1), 299.

Xu, W., Lijin, B., Duan, M., Wang, X., Wicaksana, J.,

Min, A., Ahmed, M., Wang, R., Fang, N.X., Bermak, A., e Lee, Y. (2018). A wireless dual-mode micro thermal flow sensor system with extended flow range by using cmos-mems process. In 2018 IEEE Micro Electro Mechanical Systems (MEMS), 824–827. doi:10.1109/ MEMSYS.2018.8346682.




DOI: https://doi.org/10.34115/basrv4n3-055

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